Paper
10 May 1996 Short-time rapid thermal annealing processes for periodically domain-inverted structures with nearly straight domain walls in proton-exchanged LiTaO3
Cangsang Zhao, Reinhart Engelmann
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Abstract
Short-period domain inverted gratings with considerable inversion depth can be formed on the -z face of LiTaO3 by proton exchange in benzoic rather than pyrophosphoric acid followed by rapid thermal annealing at temperatures around 540 - 610 degree(s)C. This procedure allows the fabrication and characterization of first- second-, and third-order domain- inverted gratings for quasi-phase-matching blue-light generation. Annealing for extremely short time (approximately 6 - 12 s) is crucial for achieving domain-inverted structures with near-straight domain walls and least lateral expansion. Lateral domain expansion can be effectively suppressed by pre-annealing at low temperatures (
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Cangsang Zhao and Reinhart Engelmann "Short-time rapid thermal annealing processes for periodically domain-inverted structures with nearly straight domain walls in proton-exchanged LiTaO3", Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); https://doi.org/10.1117/12.239644
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KEYWORDS
Annealing

Waveguides

Planar waveguides

Diffusion

Lithium

Second-harmonic generation

Fabrication

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