Influence of KrF radiation on surface properties of alumina

Gines Nicolas; Michel L. Autric

doi:10.1117/12.236878

29 March 1996 Influence of KrF radiation on surface properties of alumina

Gines Nicolas, Michel L. Autric

Proceedings Volume 2702, Gas and Chemical Lasers; (1996) https://doi.org/10.1117/12.236878
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Numerous surface modifications take place during the irradiation of an alumina ceramic by a KrF excimer laser. So the aim of this work therefore is to investigate these modifications in order to control and improve the final properties of the irradiated material for possible industrial applications. Furthermore, the understanding of fundamental processes involved in the interaction is necessary to explain the phenomena observed. Here we describe the surface topography showing the modifications versus irradiation conditions. However, depending on the irradiation parameters and the surrounding atmosphere, the laser treatment leads to quite different results. One of these is the metallization of irradiated surfaces with an electrical conductivity which is not negligible on these regions. The formation of conducting patterns allows an electroless deposition with an excellent adherence and hence demonstrates potential uses in microelectronics applications.

Citation Download Citation

Gines Nicolas and Michel L. Autric "Influence of KrF radiation on surface properties of alumina", Proc. SPIE 2702, Gas and Chemical Lasers, (29 March 1996); https://doi.org/10.1117/12.236878

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