8 April 1996 Automated beam manipulation in UV laser systems
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The unique challenges of UV laser micromachining require an advanced approach to beam shaping and steering to maximize beam utilization and efficiency. As UV laser systems used in manufacturing proliferate, it is also important to streamline optical setup and operation, and move towards automation. We will discuss the use of motor and actuator control in beam delivery, and how these tools, such as motorized imaging or turning optics, and mask or shaping devices, enable UV laser systems to become more powerful and flexible, yet remain simple to use.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Warren O. Jackson, Warren O. Jackson, Jay A. Guerette, Jay A. Guerette, "Automated beam manipulation in UV laser systems", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237748; https://doi.org/10.1117/12.237748


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