8 April 1996 Nanostructuring of laser-deposited thin films
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Pulsed laser deposition (PLD) is an advantageous technique for preparation of metastable thin films for application as a material for nanofabrication technology. Crossed beam pulsed laser deposition has the advantage of a droplet-free plasma with a filtered energy distribution of the plasma particles. Different kinds of nanostructuring of thin films deposited by PLD have been investigated. By localized laser annealing of thin films deposited as a supersaturated solid Fe- C solution a disperse structure of quasi periodically arranged Fe-rich ferromagnetic particles of 500 nm diameter can be produced. By scanning tunneling microprocessing periodic rows of hillocks with 20 - 30 nm in lateral size can be grown on metastable Ni-C multilayers. The optical near-field enhancement of laser radiation near a silver tip of a scanning tunneling microscope has been used for nanostructuring of thin gold films with lateral resolution below the diffraction limit. On the example of localized oxidation of ultrathin titanium films it has been shown that by using the nonlinearity of laserchemical reactions nanostructured metal oxides can be grown by laser scanning with lateral size below the diffraction limit.
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Wolfgang Pompe, Wolfgang Pompe, Andre A. Gorbunov, Andre A. Gorbunov, "Nanostructuring of laser-deposited thin films", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237756; https://doi.org/10.1117/12.237756

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