Oxidation of titanium films irradiated with weak photon beam in the course of thermal treatment

I. S. Nupriyonok; A. M. Chaplanov; A. N. Shibko

doi:10.1117/12.234208

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1 March 1996 Oxidation of titanium films irradiated with weak photon beam in the course of thermal treatment

I. S. Nupriyonok; A. M. Chaplanov; A. N. Shibko

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Proceedings Volume 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95; (1996) https://doi.org/10.1117/12.234208
Event: Fifth International Conference on Industrial Laser and Laser Applications '95, 1995, Shatura, Moscow, Russian Federation

Abstract

Peculiarities of phase transformations occurring in titanium film under annealing accompanied by irradiation with weak photon beam are discussed. It is shown that oxidation kinetics and phase composition of the film are dependent on the energy of light quanta irradiating the film in the course of stationary annealing.

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I. S. Nupriyonok, A. M. Chaplanov, and A. N. Shibko "Oxidation of titanium films irradiated with weak photon beam in the course of thermal treatment", Proc. SPIE 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95, (1 March 1996); https://doi.org/10.1117/12.234208

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