27 May 1996 Laser conditioning of optical coatings: a statistical study of defects by atomic force microscopy
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Abstract
Laser conditioning is a process which consists in illuminating a coating by a laser below damage threshold in order to increase this threshold value. In a previous study we had reported that laser conditioning actually results in minimization or elimination of surface defects present after coating elaboration. The present paper reports a statistical study whose goal is to seek a correlation between defects size and shape, and defect evolution during laser conditioning. In order to achieve this, hundreds of defects are individually analyzed before and after laser conditioning using Atomic Force Microscopy. The observed samples are e-beam deposited highly reflecting multilayers Zr02/Si02 and Hf02/Si02 mirrors, and also single layers of Si02 and Zr02.
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Anne Fornier, Anne Fornier, C. Cordillot, C. Cordillot, D. Bernardino, D. Bernardino, Dominique Ausserre, Dominique Ausserre, F. Paris, F. Paris, } "Laser conditioning of optical coatings: a statistical study of defects by atomic force microscopy", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); doi: 10.1117/12.240386; https://doi.org/10.1117/12.240386
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