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27 May 1996 Optically tuning a dichroic multilayer stack for a high-fluence laser application
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Abstract
We report on the design and successful fabrication of a dichroic multilayer stack using a procedure that allowed shifting from high reflectance to high transmittance within 89 nm and surviving high laser fluences. A design approach based on quarter-wave thick layers allowed the multilayer stack to be optically tuned in the last layers of the stack. In our case, this necessitated removing the samples from the coating chamber for a transmittance scan prior to depositing the last layers. This procedure is not commonly practiced due to thermal stress- induced failures in an oxide multilayer. However, D. J. Smith and co-workers reported that reactive e-beam evaporated hafnia from a Hf source produced laser-resistant coatings that had less coating stress compared to coatings evaporated from a HfO2 source. Tuned dichroic coatings were made that had high transmittance at 941 nm and high reflectance at 1030 nm. The coating was exposed for 5 minutes to a 100 kW/cm2 1064 nm (180-ns pulsewidth, 10.7 kHz) laser beam and survived without microscopic damage. The same coating survived a 140 kW/cm2 of laser intensity without catastrophic damage before optical tuning was performed.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert Chow, Gary E. Loomis, Camille M. Bibeau, Nicole E. Molau, Vernon Keith Kanz, and Raymond J. Beach "Optically tuning a dichroic multilayer stack for a high-fluence laser application", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); https://doi.org/10.1117/12.240414
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