27 May 1996 UV damage threshold of molecular-beam-deposited fluoride coatings
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Optical coatings for the ultraviolet spectral region consisting of fluorides have been made by molecular beam deposition in ultrahigh vacuum. The laser induced damage threshold at (lambda) equals 248 nm of the NdF3 single layers has been improved by means of reactive deposition. It was found that the threshold of fluoride antireflection coatings for 248 nm is significantly lower than that of single layers and does not show significant dependence on reactive gas conditions. A surface smoothing has been obtained due to an interrupted growth of very thin sublayers crystallizing in different crystal lattices. The damage threshold of interrupted grown antireflection coatings is somewhat higher than that of a conventional one.
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Sven Laux, Sven Laux, Klaus R. Mann, Klaus R. Mann, Ute Kaiser, Ute Kaiser, Bernd Granitza, Bernd Granitza, Oliver Roth, Oliver Roth, Wolfgang Richter, Wolfgang Richter, } "UV damage threshold of molecular-beam-deposited fluoride coatings", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); doi: 10.1117/12.240373; https://doi.org/10.1117/12.240373

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