Paper
1 May 1996 Design and optimization of batch-fabricated rotative piezomotors
Patrice Le Moal, Patrice Minotti, Antoine Ferreira, P. Cusin
Author Affiliations +
Abstract
The purpose of the present paper is to develop methods allowing the design and optimization of traveling wave type ultrasonic micrometers. These methods are based on both mechanical models. The first one concerns the contact mechanism and allows us to perform the analytical calculation of the contact rate and the pressure distribution at the stator-rotor interface for a given external preload. Then, these results are included in a second model describing the driving mechanism from kinematic considerations. Both models have been validated and applied to design and manufacture micrometers fabricated from watch-making technologies. The mechanical potentialities of such piezomotors have been confirmed. Finally, a concept for batch-fabricated piezoelectric micrometers is exposed and different induced problems are discussed as perspectives.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrice Le Moal, Patrice Minotti, Antoine Ferreira, and P. Cusin "Design and optimization of batch-fabricated rotative piezomotors", Proc. SPIE 2717, Smart Structures and Materials 1996: Smart Structures and Integrated Systems, (1 May 1996); https://doi.org/10.1117/12.239059
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Interfaces

3D modeling

Manufacturing

Particles

Prototyping

Computer aided design

Silicon

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