1 May 1996 Smart vibration-isolated stage with ultralow resonance frequency
Author Affiliations +
Abstract
We developed a new vibration-isolated platform used for nanometer measurements. This platform is based on the variable pendulum principle in the X-Y direction, and the spring principle in the Z direction. Its vibration-isolated system is made up of four layers of ring elastic material and five groups of rods and springs. Viscous silicon oil is used as damping between each ring layer. Each group of rods and springs includes six rods and twelve springs, which are evenly distributed on the circumference of the circular elastic material and sustain the whole platform. Ultra-low resonant frequency characteristic is provided for the platform, with the horizontal fundamental frequency less than 0.25 Hz, and the vertical 0.47 Hz. It means that the vibration-isolating efficiency of the platform is 3.4 times higher in the vertical direction and 28 times in the horizontal, than that of normal vibration-isolated systems, whose intrinsic frequency is about 1.3 Hz high on the same vibration condition.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhuanzhi Jin, Zhuanzhi Jin, Xing-Hua Qu, Xing-Hua Qu, Boyin Lu, Boyin Lu, Yan-Xia Song, Yan-Xia Song, Jun Chen, Jun Chen, "Smart vibration-isolated stage with ultralow resonance frequency", Proc. SPIE 2720, Smart Structures and Materials 1996: Passive Damping and Isolation, (1 May 1996); doi: 10.1117/12.239109; https://doi.org/10.1117/12.239109
PROCEEDINGS
9 PAGES


SHARE
Back to Top