20 May 1996 CLASP (Capture and Locking Alignment Spring Positioner): a micromachined fiber auto-positioning device
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Abstract
This work provides a method of mechanical alignment of an array of single mode fibers to an array of optical devices. The technique uses a micromachined metal spring, which captures a vertical, pre-positioned fiber, moves it into accurate alignment, and holds it for attachment. The spring is fabricated from electroplated nickel, using photodefined polyimide as a plating mask. The nickel is plated about 80 micrometers thick, so that a large fiber depth is captured. In one application, the nickel springs can be aligned to optics on the back side of the substrate. This entire concept is referred to as CLASP (Capture and Locking Alignment Spring Positioner). These springs can be used for general alignment and capture of any fiber to any optical input or output device. Passive alignment of fiber arrays to +/- 2 micrometers accuracy has been demonstrated, with a clear path to improved accuracy.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stanley H. Kravitz, James C. Word, Thomas M. Bauer, Pamela K. Seigal, Marcelino G. Armendariz, "CLASP (Capture and Locking Alignment Spring Positioner): a micromachined fiber auto-positioning device", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240437; https://doi.org/10.1117/12.240437
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KEYWORDS
Optical alignment

Nickel

Diffraction

Plating

Single mode fibers

Optical fibers

Semiconducting wafers

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