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20 May 1996 Friction in surface-micromachined microengines
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Abstract
Understanding the frictional properties of advanced Micro-Electro-Mechanical Systems (MEMS) is essential in order to develop optimized designs and fabrication processes, as well as to qualify devices for commercial applications. We develop and demonstrate a method to experimentally measure the forces associated with sliding friction of devices rotating on a hub. The method is demonstrated on the rotating output gear of the microengine recently developed at Sandia National Laboratories. In-situ measurements of an engine running at 18300 rpm give a coefficient of friction of 0.5 for radial (normal) forces less than 4 (mu) N. For larger forces the effective coefficient of friction abruptly increases, suggesting a fundamental change in the basic nature of the interaction between the gear and hub. The experimental approach we have developed to measure the frictional forces associated with the microengine is generically applicable to other MEMS devices.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Samuel L. Miller, Jeffry J. Sniegowski, Glen LaVigne, and Paul J. McWhorter "Friction in surface-micromachined microengines", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240444
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