20 May 1996 Integrated force array: positioning drive applications
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Integrated Force Arrays (IFAs) are thin film membrane actuators that act as transfer devices for electrostatic force. They are capable of large amplitude motion and evidence significant energies per unit volume (eg. 8.2 erg/mm3). Devices which use IFAs as drivers to scan PZT acoustic imaging transducers are under development and will be discussed here.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen M. Bobbio, Stephen M. Bobbio, Scott H. Goodwin-Johansson, Scott H. Goodwin-Johansson, Thomas D. DuBois, Thomas D. DuBois, Farid M. Tranjan, Farid M. Tranjan, Stephen W. Smith, Stephen W. Smith, Richard B. Fair, Richard B. Fair, Christian Ball, Christian Ball, James Jacobson, James Jacobson, Charles Bartlett, Charles Bartlett, Nadeem Eleyan, Nadeem Eleyan, Hussein Makki, Hussein Makki, R. Gupta, R. Gupta, } "Integrated force array: positioning drive applications", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240436; https://doi.org/10.1117/12.240436

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