Integrated force array: positioning drive applications

Stephen M. Bobbio; Scott H. Goodwin-Johansson; Thomas D. DuBois; Farid M. Tranjan; Stephen W. Smith; Richard B. Fair; Christian Ball; James Jacobson; Charles Bartlett; Nadeem Eleyan; Hussein Makki; R. Gupta

doi:10.1117/12.240436

20 May 1996 Integrated force array: positioning drive applications

Stephen M. Bobbio, Scott H. Goodwin-Johansson, Thomas D. DuBois, Farid M. Tranjan, Stephen W. Smith, Richard B. Fair, Christian Ball, James Jacobson, Charles Bartlett, Nadeem Eleyan, Hussein Makki, R. Gupta

Author Affiliations +

Proceedings Volume 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS; (1996) https://doi.org/10.1117/12.240436
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

Integrated Force Arrays (IFAs) are thin film membrane actuators that act as transfer devices for electrostatic force. They are capable of large amplitude motion and evidence significant energies per unit volume (eg. 8.2 erg/mm³). Devices which use IFAs as drivers to scan PZT acoustic imaging transducers are under development and will be discussed here.

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Stephen M. Bobbio, Stephen M. Bobbio, Scott H. Goodwin-Johansson, Scott H. Goodwin-Johansson, Thomas D. DuBois, Thomas D. DuBois, Farid M. Tranjan, Farid M. Tranjan, Stephen W. Smith, Stephen W. Smith, Richard B. Fair, Richard B. Fair, Christian Ball, Christian Ball, James Jacobson, James Jacobson, Charles Bartlett, Charles Bartlett, Nadeem Eleyan, Nadeem Eleyan, Hussein Makki, Hussein Makki, R. Gupta, R. Gupta, } "Integrated force array: positioning drive applications", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240436; https://doi.org/10.1117/12.240436

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