Integration of thin film electronics and MEMS

Stephen J. Fonash

doi:10.1117/12.240430

20 May 1996 Integration of thin film electronics and MEMS

Stephen J. Fonash

Proceedings Volume 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS; (1996) https://doi.org/10.1117/12.240430
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

The integration of thin film electronics and opto-electronics with MEMs is discussed. Thin film electronics and opto-electronics based on amorphous silicon or polycrystalline silicon are considered for integration with MEMs devices based on piezoelectric thin films or on amorphous or poly-Si thin films.

Citation Download Citation

Stephen J. Fonash "Integration of thin film electronics and MEMS", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240430

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