20 May 1996 Integration of thin film electronics and MEMS
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The integration of thin film electronics and opto-electronics with MEMs is discussed. Thin film electronics and opto-electronics based on amorphous silicon or polycrystalline silicon are considered for integration with MEMs devices based on piezoelectric thin films or on amorphous or poly-Si thin films.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen J. Fonash, "Integration of thin film electronics and MEMS", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240430; https://doi.org/10.1117/12.240430

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