20 May 1996 Integration of thin film electronics and MEMS
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The integration of thin film electronics and opto-electronics with MEMs is discussed. Thin film electronics and opto-electronics based on amorphous silicon or polycrystalline silicon are considered for integration with MEMs devices based on piezoelectric thin films or on amorphous or poly-Si thin films.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen J. Fonash, Stephen J. Fonash, } "Integration of thin film electronics and MEMS", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240430; https://doi.org/10.1117/12.240430

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