20 May 1996 Self-compensating interface system for high-performance MEMS inertial sensors
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Abstract
The next generation of navigation sensors, which includes microaccelerometers and microgyroscopes, presents high challenges in developing sensitive interface circuits. The shrinking sensor dimensions lead to small output signals that must be processed by the interface electronics. This paper presents a novel interface circuit that can be applied to both fully-differential capacitive and piezoresistive sensors. An equivalent Blumlein Bridge circuit is implemented on CMOS using a novel feedback loop that balances the signals applied to the transducer electrodes. Charge injection is drastically reduced by a double sampling method and a novel adaptive feedback loop that incorporates a compensation switch. The charge injection is reduced to a level below the thermal noise of the opamp. In addition, the feedback loop that is used for reducing the charge injection eliminates supply drift errors. Resolution and stability levels of 10-8 with a supply variation of 10% are achieved.
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Amit Burstein, Amit Burstein, William J. Kaiser, William J. Kaiser, } "Self-compensating interface system for high-performance MEMS inertial sensors", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240439; https://doi.org/10.1117/12.240439
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