Fine-pitch control in EB lithography for semiconductor laser grating formation

Yoshihiro Hisa; Hiroyuki Minami; Kimitaka Shibata; Akira Takemoto; Kazuhiko Sato; Kouki Nagahama; Mutuyuki Otsubo; Masao Aiga

doi:10.1117/12.240467

27 May 1996 Fine-pitch control in EB lithography for semiconductor laser grating formation

Yoshihiro Hisa, Hiroyuki Minami, Kimitaka Shibata, Akira Takemoto, Kazuhiko Sato, Kouki Nagahama, Mutuyuki Otsubo, Masao Aiga

Author Affiliations +

Proceedings Volume 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI; (1996) https://doi.org/10.1117/12.240467
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

Grating-pitch accuracy is studied from minimum pitch variation point of view. The pitches of the gratings delineated at the focus range from -50micrometers to +50micrometers and stitching errors between subfields are evaluated using an EB machine which features a long distance between the deflector and the wafer stage. The grating pitch variation is realized by using a deflection amplitude control. It is confirmed that errors of the pitches due to defocus are less than 0.05 nm, and the deviations from nominal setting of the pitch are also less than 0.1 nm when the pitches are varied from -6 percent to +6 percent at 0.1 percent step.

Citation Download Citation

Yoshihiro Hisa, Hiroyuki Minami, Kimitaka Shibata, Akira Takemoto, Kazuhiko Sato, Kouki Nagahama, Mutuyuki Otsubo, and Masao Aiga "Fine-pitch control in EB lithography for semiconductor laser grating formation", Proc. SPIE 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, (27 May 1996); https://doi.org/10.1117/12.240467

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available