Simulation and modeling of electron-beam lithography for delineating 0.2-um line and space patterns

Young-Mog Ham; Changbuhm Lee; Taewon Suh; KukJin Chun; Jong-Duk Lee

doi:10.1117/12.240466

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27 May 1996 Simulation and modeling of electron-beam lithography for delineating 0.2-um line and space patterns

Young-Mog Ham; Changbuhm Lee; Taewon Suh; KukJin Chun; Jong-Duk Lee

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Proceedings Volume 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI; (1996) https://doi.org/10.1117/12.240466
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

This paper reports the initial results and experimental approach method on three-dimensional simulation and modeling of electron beam lithography in the 0.2micrometers line and space patterns. We studied the electron scattering distribution in the resist, the energy distribution of patterns and the developement mechanism for profile formation. The simplified string model of three-dimensions is used to remove the pattern exposed by direct writing. Development rate is experimentally decided as the dependency of dose, development time, and resisit characteristics in the solvents to delineate 0.2micrometers /0.3micrometers line and space patterns for negative and positive resist. As a result, we obtained the optimum resist profile of 0.2micrometers line and space patterns with various forms as the variance of exposure energy and develop time. Also, we can see the proximity effects in generating pattern. These results agree with actual process for deep sub-micron patterns.

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Young-Mog Ham, Changbuhm Lee, Taewon Suh, KukJin Chun, and Jong-Duk Lee "Simulation and modeling of electron-beam lithography for delineating 0.2-um line and space patterns", Proc. SPIE 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, (27 May 1996); doi: 10.1117/12.240466; https://doi.org/10.1117/12.240466

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