27 May 1996 Submicrometer resolution of contact printing by pulsed excimer laser radiation in thin films As2S3
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Lolita G. Rotkina, Lolita G. Rotkina, N. A. Kaliteevskaia, N. A. Kaliteevskaia, Ruben P. Seisyan, Ruben P. Seisyan, D. V. Smirnov, D. V. Smirnov, S. Babushkin, S. Babushkin, M. A. Vasilevsky, M. A. Vasilevsky, } "Submicrometer resolution of contact printing by pulsed excimer laser radiation in thin films As2S3", Proc. SPIE 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, (27 May 1996); doi: 10.1117/12.240483; https://doi.org/10.1117/12.240483
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