14 June 1996 Highly absorbing ARC for DUV lithography
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Abstract
The properties of a new anti-reflective coating for 248 nm lithography are described. It is formed by thermally cross-linking a spin-on organic coating, and has an absorbance greater than 12/micrometers. It is compatible with UVIIHS and APEX-E photoresists. Thin films (less than 600 angstrom over silicon substrates) are found to completely suppress standing waves, to reduce EO swing curves to less than 3%, and to offer good CD control over typical field oxide topography. The etch rate was found to be comparable to that of the APEX-E photoresist.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edward K. Pavelchek, Edward K. Pavelchek, James D. Meador, James D. Meador, Douglas J. Guerrero, Douglas J. Guerrero, James E. Lamb, James E. Lamb, Ajit Kache, Ajit Kache, Manuel doCanto, Manuel doCanto, Timothy G. Adams, Timothy G. Adams, David R. Stark, David R. Stark, Daniel A. Miller, Daniel A. Miller, } "Highly absorbing ARC for DUV lithography", Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996); doi: 10.1117/12.241867; https://doi.org/10.1117/12.241867
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