Postexposure bake characterization and parameter extraction for positive deep-UV resists through broad-area exposure experiments

Marco Antonio Zuniga; Andrew R. Neureuther

doi:10.1117/12.241810

14 June 1996 Postexposure bake characterization and parameter extraction for positive deep-UV resists through broad-area exposure experiments

Marco Antonio Zuniga, Andrew R. Neureuther

Author Affiliations +

Proceedings Volume 2724, Advances in Resist Technology and Processing XIII; (1996) https://doi.org/10.1117/12.241810
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

This paper presents a methodology for extracting post exposure bake reaction and diffusivity parameters through broad area exposures, without the need for FTIR measurements. The parameter estimates are obtained by varying processing conditions as to achieve the same dissolution rate, and hence the same level of deprotection. Experiments conducted with APEX-E resulted in the following reaction parameter estimates, K₁ equals 2.31/sec, K₂ equals 0.0038/sec and m equals 1.71, which are in close agreement with values obtained with FTIR data. To calibrate the acid diffusion, top-to-top contact diffusion experiments can be used. Results for APEX-E gave diffusivity estimates for an exponential diffusion model of D_o equals 5.6e-6 and (omega) equals 5.8. An analysis of variance conducted on the data shows a constant diffusion model has considerable lack of fit.

Citation Download Citation

Marco Antonio Zuniga and Andrew R. Neureuther "Postexposure bake characterization and parameter extraction for positive deep-UV resists through broad-area exposure experiments", Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996); https://doi.org/10.1117/12.241810

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available