14 June 1996 Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition
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Abstract
Supercritical fluids were used to fractionate a conventional 60 meta/40 para cresol novolac into five narrow polydispersivity fractions. Single and multiple fractions were esterified with a DNQ moiety and recombined to obtain a resist having essentially the same molecular weight and composition as the original parent novolac. Fractions 1 - 4 were esterified. An experimental design was constructed and the resulting selectively esterified novolacs were used to study resist properties as a function of the molecular weight and composition of the esterified fractions. Positive resists prepared from fraction 2 (MW 870 and 69% m-cresol), and fractions 2 and 4 (MW 3064 and 75% m-cresol) exhibited better performance compared to resists prepared from other selectively esterified fractions and the randomly esterified parent novolac.
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Alfred T. Jeffries, Alfred T. Jeffries, David J. Brzozowy, David J. Brzozowy, Bernard T. Beauchemin, Bernard T. Beauchemin, Ahmad A. Naiini, Ahmad A. Naiini, Edward A. Fitzgerald, Edward A. Fitzgerald, Paula M. Gallagher-Wetmore, Paula M. Gallagher-Wetmore, } "Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition", Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996); doi: 10.1117/12.241845; https://doi.org/10.1117/12.241845
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