Comparison of particle measurement tools for use with photoresist: film surface versus liquid techniques

Michael Anderson; Susan Bablouzian; Michael Gaudet; Linda L. Kenyon; Pamela Turci

doi:10.1117/12.240083

21 May 1996 Comparison of particle measurement tools for use with photoresist: film surface versus liquid techniques

Michael Anderson, Susan Bablouzian, Michael Gaudet, Linda L. Kenyon, Pamela Turci

Proceedings Volume 2725, Metrology, Inspection, and Process Control for Microlithography X; (1996) https://doi.org/10.1117/12.240083
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

Currently, the state-of-the-art for particle detection in photoresist is liquid laser scattering technology, which has a particle size capability of approximately 0.25 micrometer for photoresist. Surface tool particle size capabilities are similar, at 0.2 micrometer in a typical application. In our search for techniques which would allow detection of sub-quarter micron particles in photoresists, we sought to explore whether surface particle detection techniques could be of use in determining resist cleanliness. If so, could any correlation be made between counts at various particle sizes measured using liquid laser techniques and those measured with a surface detection tool? To begin to answer these questions, a screening study was undertaken. Two resist chemistries were selected for comparison: diazonaphthoquinone/novolak-based Shipley Megaposit^R SPR^R 510A i-line photoresist and chemically-amplified Shipley APEX-E DUV photoresist. Each resist was prepared at three different cleanliness levels, as determined by liquid laser particle counting. These samples were evaluated on six different surface detection tools, including both laser scattering and digital image processing technologies. For the particle sizes examined, none of the surface detection tools evaluated were consistently able to distinguish between cleanliness levels.

Citation Download Citation

Michael Anderson, Susan Bablouzian, Michael Gaudet, Linda L. Kenyon, and Pamela Turci "Comparison of particle measurement tools for use with photoresist: film surface versus liquid techniques", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240083

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KEYWORDS

Particles

Semiconducting wafers

Dye lasers

Photoresist materials

Laser scattering

Photoresist processing

Liquids

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