21 May 1996 Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system
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Ian Preston Lincoln, Ian Preston Lincoln, Rebecca S. Howland, Rebecca S. Howland, Keith B. Wells, Keith B. Wells, "Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); doi: 10.1117/12.240123; https://doi.org/10.1117/12.240123
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