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21 May 1996 Nanometer-scale dimensional metrology with noncontact atomic force microscopy
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Abstract
Results from an extensive performance study on a noncontact scanning mode atomic fore microscope (AFM) are presented. The application of AFM to complement in-line CD metrology SEMs also is described.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Herschel M. Marchman "Nanometer-scale dimensional metrology with noncontact atomic force microscopy", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240110
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