7 June 1996 Fabrication of 1D gratings on photoresist for light-scattering and memory-effect measurements
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Abstract
An optical method of fabricating one- and two-dimensional diffraction gratings is described. As opposed to conventional gratings which feature regularly spaced grooves, these gratings have variable profiles which represent mathematical functions previously defined. These surface profiles are produced by a laser beam exposing photoresist-coated plates with a raster scanner under computer control. Two kinds of 1-D profiles for the gratings have been made: (1) Deterministic: the profile represents a mathematical function; and (2) Random: gratings possess random profile with certain statistical distributions. Several surfaces have been fabricated and characterized with a stylus profilometer. By changing surface deterministic and statistical properties, the light-scattering in the far-field can be controlled for many optical applications.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zu-Han Gu, Zu-Han Gu, Michel A. Josse, Michel A. Josse, } "Fabrication of 1D gratings on photoresist for light-scattering and memory-effect measurements", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); doi: 10.1117/12.240961; https://doi.org/10.1117/12.240961
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