7 June 1996 Fast-marching level-set methods for three-dimensional photolithography development
Author Affiliations +
The fast marching method, introduced by Sethian, is a numerical technique for solving the Eikonal equation, and results from combining upwind schemes for viscosity solutions of Hamilton-Jacobi equations, narrow band level set methods, and a fast min-heap algorithm. On a rectangular grid of N total points, the fast marching level set method computes the solution to the Eikonal equation from given initial data in O(N log N) steps. In a series of papers, we have applied this technique to a wide collection of problems, including construction of geodesics on surfaces, computer vision, and shape-from-shading. In this paper, we analyze the application of the fast marching method to photolithography development.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James A. Sethian, James A. Sethian, } "Fast-marching level-set methods for three-dimensional photolithography development", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); doi: 10.1117/12.240962; https://doi.org/10.1117/12.240962

Back to Top