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7 June 1996 Micrascan III: 0.25-um resolution step-and-scan system
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Abstract
Catadioptric step-and-scan lithography offers specific advantages over step-and-repeat all- refractive (dioptric) systems as resolution requirements drive to 0.25micrometers in volume production. For the Micrascan family of step-and-scan tools this step in the evolutionary path from 0.35micrometers to 0.25micrometers has involved changes to both the projection optics and illumination system.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David M. Williamson, James A. McClay, Keith W. Andresen, Gregg M. Gallatin, Marc D. Himel, Jorge Ivaldi, Christopher J. Mason, Andrew W. McCullough, Charles Otis, John J. Shamaly, and Carol Tomczyk "Micrascan III: 0.25-um resolution step-and-scan system", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); https://doi.org/10.1117/12.240939
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