7 June 1996 Optimization of stepper parameters and their influence on OPC
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Abstract
An algorithm for the optimization of stepper parameters has been designed and implemented. The cost function used in this optimization is the contrast. The aerial image is computed using the computer code FAIM. First, the contrast of the image is calculated and the derivatives of the contrast with respect to the stepper parameters are evaluated. The computational cost of these calculations is only slightly more than that of one aerial image simulation. A conjugate gradient type algorithm is then used to obtain the minimum of the contrast.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rakesh R. Vallishayee, Rakesh R. Vallishayee, Steven A. Orszag, Steven A. Orszag, Eytan Barouch, Eytan Barouch, } "Optimization of stepper parameters and their influence on OPC", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); doi: 10.1117/12.240931; https://doi.org/10.1117/12.240931
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