Reconstruction of surface profiles from scattering data

Colin J. R. Sheppard; John C. Quartel

doi:10.1117/12.231084

5 February 1996 Reconstruction of surface profiles from scattering data

Colin J. R. Sheppard, John C. Quartel

Proceedings Volume 2730, Second Iberoamerican Meeting on Optics; (1996) https://doi.org/10.1117/12.231084
Event: Second Iberoamerican Meeting on Optics, 1995, Guanajuato, Mexico

Abstract

Algorithms for reconstruction of surface profiles from scattering data are presented. The methods are based on surface profiling methods of confocal microscopy. They use the principle of the three-dimensional spatial frequency content, and the Kirchhoff approximation.

Citation Download Citation

Colin J. R. Sheppard and John C. Quartel "Reconstruction of surface profiles from scattering data", Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); https://doi.org/10.1117/12.231084

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