5 February 1996 Reconstruction of surface profiles from scattering data
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Proceedings Volume 2730, Second Iberoamerican Meeting on Optics; (1996) https://doi.org/10.1117/12.231084
Event: Second Iberoamerican Meeting on Optics, 1995, Guanajuato, Mexico
Abstract
Algorithms for reconstruction of surface profiles from scattering data are presented. The methods are based on surface profiling methods of confocal microscopy. They use the principle of the three-dimensional spatial frequency content, and the Kirchhoff approximation.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Colin J. R. Sheppard, Colin J. R. Sheppard, John C. Quartel, John C. Quartel, } "Reconstruction of surface profiles from scattering data", Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); doi: 10.1117/12.231084; https://doi.org/10.1117/12.231084
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