5 February 1996 Surface evaluation combining the moire effect and phase-stepping techniques in Fizeau interferometry
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Proceedings Volume 2730, Second Iberoamerican Meeting on Optics; (1996) https://doi.org/10.1117/12.231093
Event: Second Iberoamerican Meeting on Optics, 1995, Guanajuato, Mexico
Abstract
The usual phase-stepping algorithms are employed to evaluate the phase of Fizeau interferograms in topographic measurements. The superposition of the interferogram with a Ronchi grid provides a Moire pattern. The phase modulation is obtained by the in plane displacement of the grid, while a sinusoidal intensity pattern is obtained by defocusing the image acquisition system. In this work, the measurement range of the method in the function of the maximum variation of height surfaces is calculated and verified.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Benito Vasquez Dorrio, Benito Vasquez Dorrio, Jesus Blanco-Garcia, Jesus Blanco-Garcia, Angel F. Doval, Angel F. Doval, Jose Carlos Lopez Vazquez, Jose Carlos Lopez Vazquez, R. Soto, R. Soto, J. Bugarin, J. Bugarin, J. L. Fernandez, J. L. Fernandez, Mariano Perez-Amor, Mariano Perez-Amor, } "Surface evaluation combining the moire effect and phase-stepping techniques in Fizeau interferometry", Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); doi: 10.1117/12.231093; https://doi.org/10.1117/12.231093
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