Surface profilometry in the spectral domain

Jose E. Calatroni; Carmen Sainz; Antonio L. Guerrero; Rafael A. Escalona Z.

doi:10.1117/12.231099

5 February 1996 Surface profilometry in the spectral domain

Jose E. Calatroni, Carmen Sainz, Antonio L. Guerrero, Rafael A. Escalona Z.

Proceedings Volume 2730, Second Iberoamerican Meeting on Optics; (1996) https://doi.org/10.1117/12.231099
Event: Second Iberoamerican Meeting on Optics, 1995, Guanajuato, Mexico

Abstract

Spectrally resolved white light interferometry (SRWLI) is applied to 1-D profilometry. The technique allows us to deal with discontinuous profiles without any ambiguity. Experimental results show good agreement with phase shifting profilometry; nanometric resolution is attained. In order to extend the method to 2-D samples, double spectral modulation (DSM) is applied using a new experimental set-up which enhances luminosity.

Citation Download Citation

Jose E. Calatroni, Carmen Sainz, Antonio L. Guerrero, and Rafael A. Escalona Z. "Surface profilometry in the spectral domain", Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); https://doi.org/10.1117/12.231099

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