IR detector system based on high-Tc superconducting bolometer on Si membrane

M. Burnus; G. Hefle; T. Heidenblut; Igor A. Khrebtov; J. Laukemper; W. Michalke; Helmut Neff; B. Schwierzi; Olga K. Semtchinova; Erwin Steinbeiss; A. D. Tkachenko

doi:10.1117/12.243057

17 June 1996 IR detector system based on high-Tc superconducting bolometer on Si membrane

M. Burnus, G. Hefle, T. Heidenblut, Igor A. Khrebtov, J. Laukemper, W. Michalke, Helmut Neff, B. Schwierzi, Olga K. Semtchinova, Erwin Steinbeiss, A. D. Tkachenko

Author Affiliations +

Proceedings Volume 2746, Infrared Detectors and Focal Plane Arrays IV; (1996) https://doi.org/10.1117/12.243057
Event: Aerospace/Defense Sensing and Controls, 1996, Orlando, FL, United States

Abstract

An infrared detector system based on high-T_c superconducting (HTS) membrane bolometer is reported. Superconducting transition-edge bolometer has been manufactured by silicon micromachining using an epitaxial GdBa₂Cu₃O_7-x film on an epitaxial yttria- stabilized zirconia buffer layer on silicon. The active area of the element is 0.85 X 0.85 mm². The membrane thickness is 1 micrometers , those of the buffer layer and HTS films are 50 nm. The detectivity of bolometer, D^*, is 3.8 X 10⁹ cm Hz^1/2 W^-1 at 84.5 K and within the frequency regime 100 < f < 300 Hz. The optical response is 580 V/W at time constant 0.4 ms. This is one of the fastest composite type HTS-bolometer ever reported. The bolometer is mounted on a metal N₂-liquid cryostat, which fits the preamplifier. With the volume of N₂-reservoir being 0.1 liter, the cryostat holds nitrogen for about 8 hours. Using only wire heater with constant current, the temperature stability of about 0.03 K/h is achieved. The detector system can be used in IR- Fourier spectroscopy at wavelengths longer than the typical operating range of semiconductor detectors (wavelength greater than about 20 micrometers ).

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M. Burnus, G. Hefle, T. Heidenblut, Igor A. Khrebtov, J. Laukemper, W. Michalke, Helmut Neff, B. Schwierzi, Olga K. Semtchinova, Erwin Steinbeiss, and A. D. Tkachenko "IR detector system based on high-Tc superconducting bolometer on Si membrane", Proc. SPIE 2746, Infrared Detectors and Focal Plane Arrays IV, (17 June 1996); https://doi.org/10.1117/12.243057

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