Direct Determination Of The Far-Infrared Optical Constants Of A Solid

D. G. Mead

doi:10.1117/12.931696

30 April 1981 Direct Determination Of The Far-Infrared Optical Constants Of A Solid

D. G. Mead

Proceedings Volume 0276, Optical Characterization Techniques for Semiconductor Technology; (1981) https://doi.org/10.1117/12.931696
Event: 1981 Microlithography Conferences, 1981, San Jose, United States

Abstract

In this paper is described the principles of an asymmetric Michelson interferometer for use in the far infrared region of the electromagnetic spectrum, for the direct determination of the optical constants of a solid. Further, an apparatus for realizing the determination of the optical properties is described, and the method and some recent developments are included. The instrument is useful for the material characterization of semiconductors and some examples are given.

Citation Download Citation

D. G. Mead "Direct Determination Of The Far-Infrared Optical Constants Of A Solid", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); https://doi.org/10.1117/12.931696

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available