Optical Properties Of Proton Implanted N-Type GaAs

J. M. Zavada; H. A. Jenkinson; T. J. Gavanis

doi:10.1117/12.931694

30 April 1981 Optical Properties Of Proton Implanted N-Type GaAs

J. M. Zavada, H. A. Jenkinson, T. J. Gavanis

Proceedings Volume 0276, Optical Characterization Techniques for Semiconductor Technology; (1981) https://doi.org/10.1117/12.931694
Event: 1981 Microlithography Conferences, 1981, San Jose, United States

Abstract

The optical properties of semiconductor crystalline materials can be altered through ion implantation according to various physical mechanisms. In this paper we examine the optical changes in GaAs brought about by free carrier compensation. N-type GaAs wafers with a high free carrier concentration are implanted with protons having an energy of 300 keV. The infrared properties of the resulting altered surface layer are characterized by infrared reflectance measurements. A spectrophotometer is used to measure the reflectivity of the implanted wafers from 4000 cm ^-1 to 200 cm ^-1. Interference fringes typical of a thin layer/substrate structure is observed. From the location of the fringes and a classical dielectric model, the effective thickness and the average free carrier concentration of the altered layer are obtained. This data is used in computer simulations to achieve good agreement with the measured reflectivity over the entire spectral range.

Citation Download Citation

J. M. Zavada, H. A. Jenkinson, and T. J. Gavanis "Optical Properties Of Proton Implanted N-Type GaAs", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); https://doi.org/10.1117/12.931694

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available