19 August 1996 Analysis of defects in multilayers through photothermal deflection technique
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Abstract
A theoretical discussion on the resolution of buried air defects by using the photothermal deflection technique is presented. The thermal wave interferometry theory is described for the general case of layered materials. The principle of measurement of thermal parameter is reviewed. The analysis of buried air gap is made considering the defect like a mirror which is able to reflect partially the thermal wave giving rise to an interference effect at the solid surface. The condition of this interference is studied together with the limit to the capability to detect defects. The surprising theoretical result is that an air buried layer of thickness less than 1 percent of the air thermal wavelength is still detectable. The photothermal deflection technique is introduced as a suitable technique to investigate the thermal interference effects.
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Mario Bertolotti, Roberto Li Voti, Concita Sibilia, G. L. Liakhou, "Analysis of defects in multilayers through photothermal deflection technique", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246763; https://doi.org/10.1117/12.246763
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