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19 August 1996 Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods
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Abstract
We investigated thin MgF2/LaF3- and LaF3/MgF2-layers on opaque glass with angle resolved light scattering to analyze the different scattering contributions. We already showed the possibility of separating the volume scattering from the interface contribution for a single MgF2-layer on BK7. In this work we concentrated on layers with thicknesses common for multilayer mirrors in the UV. The roughness of the interfaces was included in the calculations by the power spectral density measured with the atomic force microscope. This has proven to be better than a Gaussian or exponential correlation function ansatz. In order to obtain as much information as possible we also investigated the uncoated substrates and the corresponding single layer systems. We found again that the investigated layers, which have columnar structure, showed generally non-negligible volume scattering. Additionally crosscorrelation between the different interfaces must be taken into consideration.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephan Pichlmaier, Karl Hehl, Uwe Schuhmann, Stefan Gliech, and Angela Duparre "Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246757
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