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19 August 1996 Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
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Abstract
A total integrated scattering measurement set-up is described which enables the detection of scattered light within a spatial frequency range from 0.0041 micrometers-1 to 4 micrometers-1. The apparatus is based on a Coblentz sphere and is equipped with light sources in the wavelength range from the UV to IR. Examples are presented of measurements on samples with rms- roughnesses from angstroms to microns.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefan Gliech and Angela Duparre "Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246758
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