Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

Stefan Gliech; Angela Duparre

doi:10.1117/12.246758

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19 August 1996 Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

Stefan Gliech, Angela Duparre

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Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246758
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

A total integrated scattering measurement set-up is described which enables the detection of scattered light within a spatial frequency range from 0.0041 micrometers^-1 to 4 micrometers^-1. The apparatus is based on a Coblentz sphere and is equipped with light sources in the wavelength range from the UV to IR. Examples are presented of measurements on samples with rms- roughnesses from angstroms to microns.

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Stefan Gliech and Angela Duparre "Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246758

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