19 August 1996 Binary diffractive elements for CO2 laser beam diagnostics
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Binary diffractive optical elements for beam diagnostics have been calculated and fabricated as reflective phase elements in copper. Our calculation combines electromagnetic theory and Fourier optics for coding phase and amplitude in the diagnostic beam. First the binary structure is fabricated in photoresist. Then a galvanic process is used to transfer these structures in copper. By including spatial filters in the design of the element a compact sensor for beam position is achieved.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Hembd-Soellner, Christel Budzinski, Hans J. Tiziani, "Binary diffractive elements for CO2 laser beam diagnostics", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246791; https://doi.org/10.1117/12.246791


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