19 August 1996 Design and fabrication of high-efficiency inclined binary high-frequency gratings
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In the conception of a planar optical backplane interconnecting comprising of a uniform power distribution, we proposed to use cascaded high frequency diffractive optical elements, each with a different diffraction efficiency in the + 1 transmitted order. We introduced a new type of binary grating: the side walls are inclined angle. The gratings were optimized with a rigorous coupled wave algorithm, Here, we investigate various etching techniques in order to realize such slanted structures in fused silica. These methods include both ion beam milling and reactive sputter etching and their variants.
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Nicole De Beaucoudrey, Nicole De Beaucoudrey, J. Michael Miller, J. Michael Miller, Pierre H. Chavel, Pierre H. Chavel, Jari Pekka Turunen, Jari Pekka Turunen, } "Design and fabrication of high-efficiency inclined binary high-frequency gratings", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246789; https://doi.org/10.1117/12.246789

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