19 August 1996 Hydrogen/oxygen radio-frequency plasma processing of LiNbO3
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Abstract
Lithium niobate substrates were processed in plasma of radio-frequency glow discharge in hydrogen and subsequently in oxygen. The modified surface layers were examined using the infrared spectroscopy and 6Li depth profiling. It was found that hydrogen plasma treatment enhances the OH band absorption which is explained as hydrogenation of Li- reduced samples. At the same time the sample surface is modified so that the reflectivity increases and the extinction coefficient of a wafer is substantially lowered. The Li-reduction is not higher than 50 percent, but the depth of the modified surface layer extends to about 20 micrometers. It is attributed to a relatively high sample heating caused by plasma which facilitates the Li mobility. A possibility of this method as an alternative technique to the annealed proton exchange is mentioned. An interesting reversed 6Li depth profile was observed, i.e. decreasing with depth. The reason of this phenomenon might be a negative surface biasing in plasma, which makes the Li+ ions to drift to the surface. It suggests an idea of thus produced 'buried' waveguide.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hana Turcicova, Jiri Vacik, Jarmila Cervena, Vladimir Zelezny, "Hydrogen/oxygen radio-frequency plasma processing of LiNbO3", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246800; https://doi.org/10.1117/12.246800
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