19 August 1996 Manufacturing error measurement for minute aspherical lens using Mach-Zehnder interferometer
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Abstract
In recent years we have used several kinds of aspherical lenses in our minute optical system. To assure the lens quality, establishing definite evaluation technique of the aspherical lenses has been required as one of the most important matters. For that purpose, we developed a technique using the Mach-Zehnder interferometer. Mach- Zehnder interferometry has the capability of estimating the total characteristic of an aspherical lens in almost the same situation as the lens is under practical use. However it has difficulty in finding out that what kinds of manufacturing errors exist and how much the errors are. Our method concerns these problems and solves by the following: (1) obtain differential coefficients of Zernike coefficients for the aspherical test sample lens by the computer simulation, giving small manufacturing errors; and (2) separate quantitatively each manufacturing error by solving the first-order-simultaneous-equation constructed with the above differential coefficients and the measured values of the Zernike coefficients.
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Minoru Oshikiri, Minoru Oshikiri, Kimihiko Nishioka, Kimihiko Nishioka, } "Manufacturing error measurement for minute aspherical lens using Mach-Zehnder interferometer", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246765; https://doi.org/10.1117/12.246765
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