19 August 1996 Method of shearing interferometry for characterizing non-Gaussian randomly rough surfaces
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Abstract
In this paper a method of shearing interferometry enabling us to perform a characterization of the basic statistical properties of non-gaussian randomly rough surfaces of solids will be described. This method is based on a statistical analysis of the form of dark fringe centers taking place in interferograms obtained by using a suitable interference microscope. By means of the method the root-mean-square values of heights and slopes, the values of autocorrelation lengths, autocorrelation coefficients of the heights and autocorrelation coefficient of the slopes of surface irregularities of glass diffusers will be determined.
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Ivan Ohlidal, Ivan Ohlidal, Miloslav Ohlidal, Miloslav Ohlidal, Daniel Franta, Daniel Franta, A. Michalek, A. Michalek, } "Method of shearing interferometry for characterizing non-Gaussian randomly rough surfaces", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246771; https://doi.org/10.1117/12.246771
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