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19 August 1996 Use of power spectral density (PSD) to specify optical surfaces
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Abstract
The power spectral density (PSD) is the most appropriate way to characterize the microroughness of a surface with a spatial wavelength range from several centimeters to a few hundred nanometers. Novel concepts to specify optical surfaces using the PSD are discussed. The results are applied to measurements obtained by a n optical heterodyne profilometer, by a mechanical profiler nanostep, and by an atomic force microscope. It is demonstrated that this method could yield a bandwidth independent model for the description of surface parameters.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Helmut H. Toebben, Gabriele A. Ringel, Frank Kratz, and Dirk-Roger Schmitt "Use of power spectral density (PSD) to specify optical surfaces", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246751
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