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19 August 1996 Graded-index films using aluminum oxynitrides
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Abstract
High quality coatings of aluminium oxynitrides have been deposited by reactive RF sputtering of aluminium in argon/oxygen/nitrogen atmospheres. Graded-index films in which the refractive index changes continuously with thickness over the range 1.6-2.0 have been produced by varying the oxygen and nitrogen content of the growing film. Computer control of the gas flow rates has allowed the reproducible production of laser rejection filters having optical densities greater than 4 and rejection wavelengths which can be chosen from < 300 to > 1100 nm. Scanning electron microscopy has shown that films when broken, tend to fracture preferentially at one particular composition. Depth profiling chemical analysis of the films has been carried our using x-ray photoelectron spectroscopy, showing clearly that the desired sinusoidal composition variations with depth has been achieved in these films.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Francis Placido, John Russell, and Zhenhui Gou "Graded-index films using aluminum oxynitrides", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246822
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