Paper
19 August 1996 Structure characteristics of stratified and single fluoride optical coatings
Miklos Adamik, G. Safran, P. B. Barna, Ute Kaiser, Sven Laux, W. Richter
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Abstract
The structure evolution characteristics of MgF2 and NdF3 optical thin films on CaF2 (111) substrates have been investigated by cross sectional transmission electron microscopy and atomic force microscopy and were related to their extinction coefficient. The films were deposited by physical vapor deposition under ultra high vacuum conditions. A series of experiments have been carried out at various substrate temperatures at 300 nm thickness and by the stratification of the two fluoride materials. The structure evolution of single and stratified films was investigated and discussed in relation to the structure zone models. The effect of stratification on the structure and extinction coefficients is discussed in comparison to the effect of segregating impurities. The development of morphology of stratified films is analyzed in relation to the thickness of the interlayers and temperature. The optimum conditions for preparing films of low extinction coefficients are found at parameters corresponding both to the transition between zone T and zone II growth and to the formation of nanocrystalline structures.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miklos Adamik, G. Safran, P. B. Barna, Ute Kaiser, Sven Laux, and W. Richter "Structure characteristics of stratified and single fluoride optical coatings", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246836
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Cited by 2 scholarly publications.
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KEYWORDS
Magnesium fluoride

Mass attenuation coefficient

Thin films

Crystals

Optical coatings

Atomic force microscopy

Polishing

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