The effect of exposure quantity as a catalyst on the development reaction in the fabrication of holographic phase diffraction grating

Byeong Ho Yun

doi:10.1117/12.2298913

1 September 1996 The effect of exposure quantity as a catalyst on the development reaction in the fabrication of holographic phase diffraction grating

Byeong Ho Yun

Author Affiliations +

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27780V (1996) https://doi.org/10.1117/12.2298913
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A new method for analyzing the refractive index modulation of the holographic phase diffraction grating is presented with the chemical mechanisms of wet processing. It is proved that the exposure quantity reacts as a catalyst at developing process and promotes the velocity of development reaction time fast. The experimental investigation has revealed that the good holographic phase gratings with diffraction efficiencies(<70%) could be taken, if the development reaction time were controlled in the 50 350[,a--- J/cm2] range of exposure quantity.

Citation Download Citation

Byeong Ho Yun "The effect of exposure quantity as a catalyst on the development reaction in the fabrication of holographic phase diffraction grating", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27780V (1 September 1996); https://doi.org/10.1117/12.2298913

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