1 September 1996 Chalcogenide inorganic resists: properties and applications in holography, optoelectronics, microlithography
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27781A (1996) https://doi.org/10.1117/12.2298928
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
Properties of chalcogenide inorganic resists and their applications in holography ( for the recording of holographic diffraction gratings, optical elements), microelectronics, optoelectronics are considered.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. V. Stronski, "Chalcogenide inorganic resists: properties and applications in holography, optoelectronics, microlithography", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781A (1 September 1996); doi: 10.1117/12.2298928; https://doi.org/10.1117/12.2298928
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